Methods of manufacturing liquid lenses

ABSTRACT

A method of forming a liquid lens, comprising the steps of: positioning a first substrate defining a hole over a second substrate, wherein a cavity is defined within the second substrate and aligned with the hole; dispensing a second liquid into the cavity defined within the second substrate; capping the second liquid with a first liquid dispensed through the hole, wherein the first liquid and the second liquid have different refractive indices than each other; and translating at least one of the first substrate and the second substrate such that the hole is not aligned with the cavity.

REFERENCE TO RELATED APPLICATIONS

This application claims the benefit of U.S. Provisional PatentApplication No. 62/674,926, filed May 22, 2018, which is incorporated byreference herein in its entirety.

FIELD OF THE DISCLOSURE

The disclosure relates to liquid lenses and, more particularly, tomethods of manufacturing liquid lenses.

BACKGROUND

Liquid lenses generally include two immiscible liquids disposed within acavity. Varying an electric field applied to the liquids can vary thewettability of one of the liquids relative to walls of the cavity, whichhas the effect of varying the shape of an interface (meniscus) formedbetween the two liquids. Further, in various applications, changes tothe shape of the interface result in changes to the focal length of thelens. There is a problem in that previously considered ways of fillingthe cavity with the two liquids are too slow, require complex equipment,and/or result in one liquid displacing the other liquid outside of thecavity.

SUMMARY OF THE DISCLOSURE

The present disclosure solves that problem with a method of forming theliquid lens that dispenses a single drop of a requisite volume of onefluid onto the other fluid already in the cavity in a manner that caps,but not displaces, the other fluid already in the cavity. The singledrop is centered over the liquid already in the cavity and released froma very short distance from the liquid already in the cavity. In anembodiment, the drop of liquid nearly simultaneously combines with aquantity of the same or similar liquid surrounding the cavity, forming acap over the fluid already in the cavity and preventing displacement ofthat fluid already in the cavity to outside of the cavity. In anembodiment, one or more additional drops of the fluid is dispensed afterthe already dispensed drop caps the other fluid, in the event thatadditional volume of the dispensed fluid is required to fill the cavity.

According to a first aspect of the present disclosure, a method offorming a liquid lens, comprises the steps of: positioning a firstsubstrate defining a hole over a second substrate, wherein a cavity isdefined within the second substrate and aligned with the hole;dispensing a second liquid into the cavity defined within the secondsubstrate; capping the second liquid with a first liquid dispensedthrough the hole, wherein the first liquid and the second liquid havedifferent refractive indices than each other; and translating at leastone of the first substrate and the second substrate such that the holeis not aligned with the cavity.

According to a second aspect, the method according to the first aspect,wherein the first substrate is a mask layer.

According to a third aspect, the method according to the first aspect,wherein the first substrate defines a first window and the secondsubstrate defines a second window.

According to a fourth aspect, the method according to any of the firstthrough third aspects, wherein the translating comprises translating thefirst substrate relative to the second substrate while maintaining thesecond substrate stationary.

According to a fifth aspect, the method according to any of the firstthrough third aspects, wherein the translating comprises translating thesecond substrate relative to the first substrate while maintaining thefirst substrate stationary.

According to a sixth aspect, the method according to any of the firstthrough fifth aspects, wherein the first liquid comprises a polarliquid.

According to a seventh aspect, the method according to any of the firstthrough sixth aspects, wherein the second liquid comprises a non-polarliquid.

According to an eighth aspect, the method according to any of the firstthrough seventh aspects, wherein the first substrate comprises a firstouter layer; and the second substrate comprises an intermediate layerand a second outer layer bonded to the intermediate layer, a borethrough the intermediate layer defining the cavity.

According to a ninth aspect, the method according to any of the firstthrough eighth aspects, wherein, the cavity includes an insulatingelement that is hydrophobic, and after the second liquid is dispensedwithin the cavity, the second liquid contacts the insulating element.

According to a tenth aspect, the method according to any of the firstthrough ninth aspects, wherein capping the second liquid with a firstliquid dispensed through the hole includes dispensing the entirety ofthe first liquid that caps the second liquid in a single drop from adispensing end of a dispenser.

According to an eleventh aspect, the method according to the tenthaspect, wherein, a central axis of the dispensing end of the dispenseris aligned with a central axis of the second liquid within the cavity asthe first liquid is dispensed.

According to a twelfth aspect, the method according to any of the tenthor eleventh aspects, wherein, the drop of the first liquid is apredetermined volume.

According to a thirteenth aspect, the method according to any of thefirst through twelfth aspects, wherein, the first liquid dispensedcontacts a surface of the first substrate defining the hole beforecontacting the second liquid.

According to a fourteenth aspect of the present disclosure, a method offorming a liquid lens, comprising the steps of: positioning a firstsubstrate defining a hole over a second substrate, wherein a cavity isdefined above the second substrate and aligned with the hole; dispensinga second liquid into the cavity defined above the second substrate;positioning a dispenser having a dispensing end over the second liquid;capping the second liquid with a first liquid dispensed through thehole, wherein the first liquid that caps the second liquid is dispensedin one drop from the dispensing end, wherein and the first liquid andthe second liquid have different refractive indices than each other; andtranslating at least one of the first substrate and the second substratesuch that the hole is not aligned with the cavity.

According to a fifteenth aspect, the method according to the fourteenthaspect, wherein the drop contains a predetermined volume of the firstliquid.

According to a sixteenth aspect, the method according to any of thefourteenth through fifteenth aspects, wherein the dispensing end of thedispenser has an internal diameter of from about 150 μm to about 250 μm.

According to a seventeenth aspect, the method according to any of thefourteenth through sixteenth aspects, wherein the drop forms a spherehaving a circumference that is less than a circumference of the hole.

According to an eighteenth aspect, the method according to any of thefourteenth through seventeenth aspects, wherein a central axis of thedispensing end aligns with a central axis of the second liquid.

According to a nineteenth aspect, the method according to any of thefourteenth through eighteenth aspects, wherein the drop dissociates fromthe dispensing end and contacts a surface of the first substrate thatdefines the hole before contacting the second liquid.

According to a twentieth aspect, the method according to any of thefourteenth through nineteenth aspects, wherein the translating comprisestranslating the second substrate relative to the first substrate whilemaintaining the first substrate stationary.

According to a twenty-first aspect, the method according to any of thefourteenth through twentieth aspects, wherein, the cavity includes aninsulating element that is hydrophobic, and after the second liquid isdispensed within the cavity, the second liquid contacts the insulatingelement.

According to a twenty-second aspect, the method according to thefourteenth through twenty-first aspects, wherein the drop has a volumeof from about 500 nanoliters to about 3.0 microliters of the firstliquid.

According to a twenty-third aspect, the method according to any of thefourteenth through twenty-second aspects, wherein the second substratehas a plurality of cavities each holding the second liquid, the firstsubstrate has a plurality of holes, each disposed over one of theplurality of cavities, and a plurality of dispensers each comprising adispensing end are positioned over the second liquid in each of theplurality of cavities, and the first liquid is simultaneously dispensedfrom each of the plurality of dispensers.

According to a twenty-fourth aspect, the method according to any of thefourteenth through twenty-third aspects, wherein after the drop of thefirst liquid caps the second liquid, a subsequent drop of the firstliquid is dispensed to add additional volume of the first liquid until apredetermined volume of the first liquid within the cavity has beenachieved.

According to a twenty-fifth aspect, the method according to any of thefourteenth through twenty-fourth aspects, wherein a volumetric ratio ofthe second liquid to the first liquid is from about 0.4 to about 0.6 anda density of the first liquid and a density of the second liquid aresubstantially similar.

According to a twenty-sixth aspect of the present disclosure, a methodof forming a liquid lens, comprises the steps of: positioning a firstsubstrate defining a hole over a second substrate, wherein a cavity isdefined within the second substrate and aligned with the hole and a gapextends between the first substrate and the second substrate and a polarfluid is disposed in the gap between the first substrate and the secondsubstrate; dispensing a second liquid into the cavity defined above thesecond substrate; capping the second liquid with a first liquiddispensed through the hole, wherein the first liquid and the secondliquid have different refractive indices than each other; andtranslating at least one of the first substrate and the second substratesuch that the hole is not aligned with the cavity.

According to a twenty-seventh aspect, the method according to thetwenty-sixth aspect, wherein the polar fluid and the first liquid havesubstantially the same composition.

According to a twenty-eighth aspect, the method according to thetwenty-sixth or twenty-seventh aspects, wherein the first liquid thatcaps the second liquid is dispensed in one drop.

According to a twenty-ninth aspect, the method according to any of thetwenty-sixth through twenty-eighth aspects, wherein the first liquidthat is dispensed meets the polar fluid and forms a contiguous cap withthe polar fluid over the second liquid.

According to a thirtieth aspect, the method according to any of thetwenty-sixth through twenty-ninth aspects, further comprising the stepof collapsing the gap such that the polar fluid in the gap issubstantially evacuated.

These and other features, advantages, and objects of the presentdisclosure will be further understood and appreciated by those skilledin the art by reference to the following specification, claims, andappended drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

The following is a description of the figures in the accompanyingdrawings. The figures are not necessarily to scale, and certain featuresand certain views of the figures may be shown exaggerated in scale or inschematic in the interest of clarity and conciseness.

In the drawings:

FIG. 1A is a schematic cross-sectional view of an embodiment of a liquidlens, illustrating a first liquid over a second liquid and forming aninterface between them, and an insulating element in contact with thefirst liquid and the second liquid;

FIG. 1B is a schematic cross-sectional view of another embodiment of aliquid lens, illustrating an insulating element that includes aninsulating outer layer and a base layer; and

FIG. 2, is a schematic flowchart of a method of forming the liquid lensof either of FIGS. 1A and 1B, according to an embodiment;

FIG. 3A is a schematic cross-section of a step of the method of FIG. 2,illustrating a second substrate including the cavity and the secondliquid of the liquid lenses of FIG. 1A or 1B, a first substrateincluding a plurality of holes aligned with the cavity, and a dispensingend of a dispenser dispensing a single drop of the first liquid throughthe hole and from a short distance above the second liquid within thecavity, with a cavity aligned with a hole;

FIG. 3B is a schematic cross-section of another step of the method ofFIG. 2, illustrating the first substrate having been translated relativeto the second substrate, such that the cavity is closed and the firstliquid and the second liquid have formed an interface;

FIG. 4A is a schematic cross-section of another embodiment of a step ofthe method of FIG. 2, illustrating a gap between the first substrate andthe second substrate that includes a polar fluid that can be the same asthe first liquid, the first substrate including a plurality of holesaligned with the cavity, and a dispensing end of a dispenser dispensinga single drop of the first liquid through the hole, through the gap, andfrom a short distance above the second liquid within the cavity, with acavity aligned with the hole;

FIG. 4B is a schematic cross-section of another embodiment of anotherstep of the method of FIG. 2, illustrating the first substrate havingbeen translated relative to the second substrate, and the polar fluid inthe gap removed, such that the cavity is closed and the first liquid andthe second liquid have formed an interface; and

FIGS. 5A-5F are a series of pictures captured during the method of FIG.2, illustrating a dispensing end of a dispenser for the first liquidcentered over the second liquid already within the cavity (FIG. 5A), adrop of a predetermined volume of the first liquid beginning to form atthe dispensing end (FIG. 5B), the drop of the predetermined volume ofthe first liquid fully formed (FIG. 5C), the first liquid just as thedrop dissociates from the dispensing end and deforms (FIG. 5D), thefirst liquid capping the second liquid but with an air bubble within thecavity forcing the first liquid upward within the hole (FIG. 5E), andthe first liquid capping the second liquid after the air bubble escapesfrom the cavity and the first liquid is able to drop below the hole(FIG. 5F).

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Additional features and advantages of the invention will be set forth inthe detailed description which follows and will be apparent to thoseskilled in the art from the description, or recognized by practicing theinvention as described in the following description, together with theclaims and appended drawings.

As used herein, the term “and/or,” when used in a list of two or moreitems, means that any one of the listed items can be employed by itself,or any combination of two or more of the listed items can be employed.For example, if a composition is described as containing components A,B, and/or C, the composition can contain A alone; B alone; C alone; Aand B in combination; A and C in combination; B and C in combination; orA, B, and C in combination.

In this document, relational terms, such as first and second, top andbottom, and the like, are used solely to distinguish one entity oraction from another entity or action, without necessarily requiring orimplying any actual such relationship or order between such entities oractions.

For purposes of this disclosure, the term “coupled” (in all of itsforms: couple, coupling, coupled, etc.) generally means the joining oftwo components (electrical or mechanical) directly or indirectly to oneanother. Such joining may be stationary in nature or movable in nature.Such joining may be achieved with the two components (electrical ormechanical) and any additional intermediate members being integrallyformed as a single unitary body with one another or with the twocomponents. Such joining may be permanent in nature, or may be removableor releasable in nature, unless otherwise stated.

As used herein, the term “about” means that amounts, sizes,formulations, parameters, and other quantities and characteristics arenot and need not be exact, but may be approximate and/or larger orsmaller, as desired, reflecting tolerances, conversion factors, roundingoff, measurement error and the like, and other factors known to those ofskill in the art. When the term “about” is used in describing a value oran end-point of a range, the disclosure should be understood to includethe specific value or end-point referred to. Whether or not a numericalvalue or end-point of a range in the specification recites “about,” thenumerical value or end-point of a range is intended to include twoembodiments: one modified by “about,” and one not modified by “about.”It will be further understood that the end-points of each of the rangesare significant both in relation to the other end-point, andindependently of the other end-point.

The terms “substantial,” “substantially,” and variations thereof as usedherein are intended to note that a described feature is equal orapproximately equal to a value or description. For example, a“substantially planar” surface is intended to denote a surface that isplanar or approximately planar. Moreover, “substantially” is intended todenote that two values are equal or approximately equal. In someembodiments, “substantially” may denote values within about 10% of eachother.

It is also important to note that the construction and arrangement ofthe elements of the disclosure, as shown in the exemplary embodiments,is illustrative only. Although only a few embodiments of the presentinnovations have been described in detail in this disclosure, thoseskilled in the art who review this disclosure will readily appreciatethat many modifications are possible (e.g., variations in sizes,dimensions, structures, shapes and proportions of the various elements,values of parameters, mounting arrangements, use of materials, colors,orientations, etc.) without materially departing from the novelteachings and advantages of the subject matter recited. For example,elements shown as integrally formed may be constructed of multipleparts, or elements shown as multiple parts may be integrally formed, theoperation of the interfaces may be reversed or otherwise varied, thelength or width of the structures, and/or members, or connectors, orother elements of the system, may be varied, and the nature or number ofadjustment positions provided between the elements may be varied. Itshould be noted that the elements and/or assemblies of the system may beconstructed from any of a wide variety of materials that providesufficient strength or durability, in any of a wide variety of colors,textures, and combinations. Accordingly, all such modifications areintended to be included within the scope of the present innovations.Other substitutions, modifications, changes, and omissions may be madein the design, operating conditions, and arrangement of the desired andother exemplary embodiments without departing from the spirit of thepresent innovations.

Referring to FIGS. 1A and 1B, a liquid lens 100 that can be preparedaccording to the method described below includes a lens body 102 and acavity 104 formed in the lens body 102. A first liquid 106 and a secondliquid 108 are disposed within the cavity 104. The first liquid 106 maybe a polar liquid or a conducting liquid. The second liquid 108 may be anon-polar liquid or an insulating liquid. The first liquid 106 and thesecond liquid 108 are immiscible with each other and have differentrefractive indices such that an interface 110 between the first liquid106 and the second liquid 108 forms a variable lens. In someconfigurations, the first liquid 106 and the second liquid 108 havesubstantially the same density, which can help to avoid changes in theshape of the interface 110 as a result of changing the physicalorientation of the liquid lens 100 (e.g., as a result of gravitationalforces). According to other configurations, the densities of the firstliquid 106 and the second liquid 108 are sufficiently different thatseparation or segmentation of the first liquid 106 and the second liquid108 occurs due to the force of gravity and the passage of time, in theevent the first liquid 106 and the second liquid 108 mix.

The first liquid 106 is generally a salt-containing aqueous liquid. Thefirst liquid 106 can be water loaded with ionic compounds (such as oneor more salts) that substantially or completely dissociate into cationsand anions in the water. The water can be ultrapure water. Examples ofanions include, but are not limited to, halides, e.g., chloride,bromide, iodide, sulfate, carbonate, hydrogen carbonate, acetate, andthe like, as well as mixtures thereof. Examples of cations include, butare not limited to, alkali, alkaline-earth, and metallic cations.Examples of dissociable ionic compounds include, but are not limited to,potassium acetate, magnesium chloride, zinc bromide, lithium bromide,sodium bromide, lithium chloride, calcium chloride, sodium sulfate, andthe like, as well as mixtures thereof. The first liquid 106 can be orcan include an ionic liquid (i.e., an ionic compound that is liquid attemperatures relevant to the application of the liquid lens 100).

The first liquid 106 can include at least one conventionalfreezing-point lowering agent. Freezing-point lowering agents include,for example, alcohols, glycols, glycol ethers, polyols,polyetherpolyols, and the like, or mixtures thereof. Specific examplesthereof include: ethanol, ethylene glycol (EG), monopropylene glycol(MPG or 1,2-propane-diol), 1,3-propane diol, 1,2,3-propane triol(glycerol), and the like, and mixtures thereof. The freezing-pointlowering agent may decrease the freezing point of the first liquid 106such that the first liquid 106 remains in the liquid state over a rangeof temperature comprised between about −20° C. and about +70° C.

The second liquid 108 is typically an oil, an alkane, or a blend ofalkanes, including halogenated alkanes, or any other non-polar orinsulating liquid that is not miscible with the first liquid 106. Thisnon-conductive fluid comprises an organic or an inorganic (mineral)compound or mixture thereof. Examples of such organic or inorganiccompounds include a Si-based monomer or oligomer, a Ge-based monomer oroligomer, a Si—Ge-based monomer or oligomer, a hydrocarbon, or a mixturethereof. Specific hydrocarbons include, for example, a linear orbranched alkane, such as decane (C₁₀H₂₂), dodecane (C₁₂H₂₄), squalane(C₃₀H₆₂), and the like; an alkane comprising one or more rings, such astert-butylcyclohexane (C₁₀H₂₀), and the like; a fused ring system, suchas α-chloronaphthalene, α-bromonaphthalene,cis,trans-decahydronaphthalene (C₁₀H₁₈), and the like; a mixture ofhydrocarbons, such as those available as Isopar® V, Isopar® P (fromExxon Mobil); and the like, and mixtures thereof. Specific examples ofsilicon based species include: hexamethyidisilane,diphenyldimethylsilane, chlorophenyltrimethylsilane,phenyltrimethyl-silane, phenethyltris(trimethylsiloxy)silane,phenyltris(trimethylsiloxy)silane, polydimethylsiloxane,tetra-phenyltetramethyltrisiloxane,poly(3,3,3-trifluoropropylmethylsiloxane),3,5,7-triphenylnonamethyl-pentasiloxane,3,5-diphenyloctamethyltetrasiloxane,1,1,5,5-tetraphenyl-1,3,3,5-tetramethyl-trisiloxane, andhexamethylcyclotrisiloxane. Specific examples of germane based speciesinclude: hexamethyldigermane, diphenyldimethylgermane, andphenyltrimethylgermane. The first liquid 106 and the second liquid 108can include anti-oxidant compounds such as the BHT-type (butylatedhydroxytoluene) anti-oxidants, such as 2,6-di-tert-butyl-4-methylphenol.

In some embodiments, the cavity 104 includes a first portion, orheadspace, 104A and a second portion, or base portion, 104B. Forexample, the second portion 104B of the cavity 104 may be defined by abore in an intermediate layer 120 of the liquid lens 100 as describedbelow. Additionally or alternatively, the first portion 104A of thecavity 104 is defined by a recess in a first outer layer 118 of theliquid lens 100 and/or disposed outside of the bore in the intermediatelayer 120. In the illustrated embodiment, at least a portion of thefirst liquid 106 is disposed in the first portion 104A of the cavity104, and the second liquid 108 is disposed within the second portion104B of the cavity 104. Substantially all or a portion of the secondliquid 108 is disposed within the second portion 104B of the cavity 104.A perimeter 111 of the interface 110 (e.g., an edge of the interface 110in contact with a sidewall of the cavity 104) may be disposed within thesecond portion 104B of the cavity 104.

The interface 110 of the liquid lens 100 can be adjusted viaelectrowetting. For example, a voltage can be applied between the firstliquid 106 and a surface of the cavity 104 (e.g., an electrodepositioned near the surface of the cavity 104 and insulated from thefirst liquid 106 as described in greater detail below) to increase ordecrease the wettability of the surface of the cavity 104 with respectto the first liquid 106 and change the shape of the interface 110.Adjusting of the interface 110 may change the shape of the interface110, which in turn changes a focal length or focus of the liquid lens100. For example, such a change of focal length can enable the liquidlens 100 to perform an autofocus function. Additionally oralternatively, adjusting the interface 110 may tilt the interface 110relative to an optical axis 112 of the liquid lens 100. For example,such tilting of the interface 110 can enable the liquid lens 100 toperform an optical image stabilization (OIS) function. Adjusting theinterface 110 can be achieved without physical movement of the liquidlens 100 relative to an image sensor, a fixed lens or lens stack, ahousing, or other components of a camera module in which the liquid lens100 can be incorporated.

The lens body 102 of the liquid lens 100 includes a first window 114 anda second window 116. The cavity 104 is disposed between the first window114 and the second window 116. In the illustrated embodiment, the lensbody 102 includes a plurality of layers that cooperatively form the lensbody 102, such as a first outer layer 118, an intermediate layer 120,and a second outer layer 122. In this instance, the intermediate layer120 defines a bore formed therethrough. The first outer layer 118 can bebonded to one side (e.g., an object side) of the intermediate layer 120.For example, the first outer layer 118 may be bonded to the intermediatelayer 120 at a bond 134A. The bond 134A can be an adhesive bond, a laserbond (e.g., a laser weld), or another suitable coupling capable ofmaintaining the first liquid 106 and the second liquid 108 within thecavity 104. The second outer layer 122 can be bonded to an opposite side(e.g., an image side) of the intermediate layer 120. For example, thesecond outer layer 122 may be bonded to the intermediate layer 120 at abond 134B and/or a bond 134C, each of which can be configured asdescribed herein with respect to the bond 134A. The intermediate layer120 is positioned between the first outer layer 118 and the second outerlayer 122, with the bore of the intermediate layer 120 being covered onopposing sides by the first outer layer 118 and the second outer layer122, and at least a portion of the cavity 104 is defined within thebore. Thus, a portion of the first outer layer 118 covering the cavity104 serves as the first window 114, and a portion of the second outerlayer 122 covering the cavity 104 serves as the second window 116.

As explained above, the cavity 104 can include the first portion 104Aand the second portion 104B. In the depicted examples, the secondportion 104B of the cavity 104 is defined by the bore in theintermediate layer 120, and the first portion 104A of the cavity 104 isdisposed between the second portion 104B of the cavity 104 and the firstwindow 114, but it will be understood that this configuration may bereversed. The first outer layer 118 includes a recess, and the firstportion 104A of the cavity 104 is disposed within the recess in thefirst outer layer 118. Thus, the first portion 104A of the cavity 104 isdisposed outside of the bore in the intermediate layer 120.

As in the illustrated embodiment, the cavity 104 (e.g., the secondportion 104B of the cavity 104) can be tapered such that across-sectional area of the cavity 104 decreases along the optical axis112 in a direction from the object side to the image side of the liquidlens 100. For example, the second portion 104B of the cavity 104includes a narrow end 105A and a wide end 105B. The terms “narrow” and“wide” are relative terms, meaning the narrow end 105A is narrower orthinner than the wide end 105B. Such a tapered example of the cavity 104can help to maintain alignment of the interface 110 between the firstliquid 106 and the second liquid 108 along the optical axis 112. Inother examples, the cavity 104 is tapered such that the cross-sectionalarea of the cavity 104 increases along the optical axis 112 in thedirection from the object side to the image side or non-tapered suchthat the cross-sectional area of the cavity 104 remains substantiallyconstant along the optical axis 112.

In operation of the liquid lens 100, image light (or whatever range ofwavelengths of electromagnetic radiation are intended to be manipulated)may enter the liquid lens 100 depicted in FIGS. 1A and 1B through thefirst window 114, be refracted at the interface 110 between the firstliquid 106 and the second liquid 108, and exit the liquid lens 100through the second window 116. The first window 114 and the secondwindow 116 are sufficiently transparent to the wavelength ofelectromagnetic radiation intended to be manipulated via the interface110, such as wavelengths within the visible and infrared spectrums.Accordingly, in some embodiments, the first outer layer 118 and/or thesecond outer layer 122 are sufficiently transparent to electromagneticradiation in the visible spectrum to enable passage of image light. Forexample, the first outer layer 118 and/or the second outer layer 122includes a polymeric material, a glass material, a ceramic material, aglass-ceramic material, other transparent materials, and/or combinationsthereof. As in the illustrated embodiment, the outer surfaces of thefirst outer layer 118 and/or the second outer layer 122 can besubstantially planar. Thus, although the liquid lens 100 can function asa lens (e.g., by refracting image light and/or other electromagneticradiation passing through the interface 110), the outer surfaces of theliquid lens 100 can be flat as opposed to being curved like the outersurfaces of a fixed lens. However, in other embodiments of the liquidlens 100, the outer surfaces of the first outer layer 118 and/or thesecond outer layer 122 are curved (e.g., concave or convex). Thus, theliquid lens 100 may include an integrated fixed lens. The intermediatelayer 120 may include a metallic material, a polymeric material, a glassmaterial, a ceramic material, a glass-ceramic material, a compositematerial, and/or combinations thereof. As the image light can passthrough the bore in the intermediate layer 120, the intermediate layer120 may or may not be transparent to the image light.

It will be understood that although the lens body 102 of the liquid lens100 is described as including the first outer layer 118, theintermediate layer 120, and the second outer layer 122, the constructionof the liquid lens 100 may be different. For example, one or more of thefirst outer layer 118, the intermediate layer 120, and/or the secondouter layer 122 may be omitted. Further, the bore in the intermediatelayer 120 can be configured as a blind hole that does not extendentirely through the intermediate layer 120, and the second outer layer122 can be omitted. Although the first portion 104A of the cavity 104 isdescribed herein as being disposed within the recess in the first outerlayer 118, other constructions are contemplated. For example, the recessmay be omitted, and the first portion 104A of the cavity 104 is disposedwithin the bore in the intermediate layer 120. In such an example, thefirst portion 104A of the cavity 104 is an upper portion of the bore,and the second portion 104B of the cavity 104 is a lower portion of thebore. In other examples, the first portion 104A of the cavity 104 isdisposed partially within the bore in the intermediate layer 120 andpartially outside the bore.

The liquid lens 100 of the illustrated embodiment includes a commonelectrode 124 in electrical communication with the first liquid 106. Theliquid lens 100 further includes a driving electrode 126 disposed on asidewall of the cavity 104 and insulated from the first liquid 106 andthe second liquid 108. Different voltages can be supplied to, or avoltage differential can be adjusted between, the common electrode 124and the driving electrode 126 to change the shape of the interface 110.

The liquid lens 100 of the illustrated embodiment includes a conductivelayer 128. At least a portion of the conductive layer 128 is disposedwithin the cavity 104. The conductive layer 128 includes a conductivecoating applied to the intermediate layer 120 prior to bonding the firstouter layer 118 and/or the second outer layer 122 to the intermediatelayer 120. The conductive layer 128 can include a metallic material, aconductive polymer material, a conductive oxide, another suitableconductive material, and/or combinations thereof. The conductive layer128 can include a single layer or a plurality of layers, some or all ofwhich can be conductive. The conductive layer 128 can define both thecommon electrode 124 and the driving electrode 126. For example, theconductive layer 128 can be applied to substantially the entire outersurface of the intermediate layer 120 before bonding the first outerlayer 118 and/or the second outer layer 122 to the intermediate layer120. Following application of the conductive layer 128 to theintermediate layer 120, the conductive layer 128 can be segmented intovarious conductive elements (e.g., the common electrode 124, the drivingelectrode 126, etc.). The liquid lens 100 can include a scribe 130A inthe conductive layer 128 to isolate (e.g., electrically isolate) thecommon electrode 124 and the driving electrode 126 from each other. Thescribe 130A includes a gap in the conductive layer 128.

In the illustrated embodiment, the liquid lens 100 includes aninsulating element 132 disposed within the cavity 104. The insulatingelement 132 can include an insulating coating applied to theintermediate layer 120 before bonding the first outer layer 118 and/orthe second outer layer 122 to the intermediate layer 120. The insulatingelement 132 may include an insulating coating applied to the conductivelayer 128 and the second window 116 after bonding the second outer layer122 to the intermediate layer 120 and before bonding the first outerlayer 118 to the intermediate layer 120. Thus, the insulating element132 covers at least a portion of the conductive layer 128 within thecavity 104 and the second window 116. The insulating element 132 issufficiently transparent to the wavelength of electromagnetic radiationintended to be manipulated via the interface 110, such as wavelengthswithin the visible and infrared spectrums to enable passage of suchelectromagnetic radiation (such as the image light) through the secondwindow 116 as described above.

In the illustrated embodiment, the insulating element 132 covers atleast a portion of the driving electrode 126 (e.g., the portion of thedriving electrode 126 disposed within the cavity 104) to insulate thefirst liquid 106 and the second liquid 108 from the driving electrode126. At least a portion of the common electrode 124 may be disposedwithin the cavity 104 and is uncovered by the insulating element 132.Thus, the common electrode 124 can be in electrical communication withthe first liquid 106. The insulating element 132 may include ahydrophobic surface layer of the second portion 104B of the cavity 104.Such a hydrophobic surface layer can help to maintain the second liquid108 within the second portion 104B of the cavity 104 (e.g., byattraction between the non-polar second liquid 108 and the hydrophobicmaterial) and/or enable the perimeter 111 of the interface 110 to movealong the hydrophobic surface layer (e.g., by electrowetting) to changethe shape of the interface 110. The liquid lens 100, based at least inpart on the insulating element 132, can exhibit a contact anglehysteresis (i.e., at the interface 110 between the first liquid 106 andthe second liquid 108) of no more than 3°. As used herein, the “contactangle hysteresis” refers to the differential in measured contact anglesof the second liquid 108 with the insulating element 132 upon asequential application of a driving voltage to the driving electrode 126(e.g., the differential between the driving voltage supplied to thedriving electrode 126 and the common voltage supplied to the commonelectrode 124) from 0V to a maximum driving voltage, followed by areturn to 0V (i.e., as relative to the common electrode 124). Theinitial contact angle, without voltage, is a maximum of 25° andincreases to the contact angle, due to the electrowetting effect, of atleast 15° at “the maximum driving voltage.” The maximum driving voltagecan be about 10V, or about 20V, or about 30V, or about 40V, or about50V, or about 60V, or about 70V, or any and all values and rangestherebetween.

In the depicted example of FIG. 1A, the liquid lens 100 is configuredsuch that the driving electrode 126 is disposed on a sidewall of thecavity 104 and insulated from the first liquid 106 and the second liquid108 by the insulating element 132. The insulating element 132 includesan insulating outer layer 132A, as shown, that is in contact with thefirst liquid 106 and the second liquid 108. In the depicted example, theinsulating element 132 is monolithic in the sense that the insulatingouter layer 132A serves the dual function of being electricallyinsulating with regard to the first liquid 106 and the second liquid 108and the driving electrode 126. The insulating element 132 may behydrophobic (e.g., to resist wetting by the first liquid 106).Monolithic examples of the insulating element 132 may be advantageousfrom a processing and/or manufacturing standpoint. A thickness of theinsulating outer layer 132A of the insulating element 132 may be fromabout 0.5 μm to about 10 μm, or from about 1 μm to about 10 μm, or fromabout 1 μm to about 9 μm, or from about 1 μm to about 8 μm, or fromabout 1 μm to about 7 μm, or from about 1 μm to about 6 μm, or fromabout 1 μm to about 5 μm, or from about 1 μm to about 4 μm, or fromabout 1 μm to about 3 μm, or from about 1 μm to about 2 μm, and any andall values and ranges therebetween. In a specific example, the thicknessof the insulating outer layer 132A of the liquid lens 100 is from about0.5 microns to about 2 microns.

In the embodiment illustrated at FIG. 1B, the liquid lens 100 isconfigured such that the driving electrode 126 is disposed on a sidewallof the cavity 104 and insulated from the first liquid 106 and the secondliquid 108 by the insulating element 132. As shown in FIG. 1B, theinsulating element 132 includes the insulating outer layer 132A that isin contact with the first liquid 106 and the second liquid 108, and abase layer 132B between the insulating outer layer 132A and the drivingelectrode 126. The insulating element 132 may be a multi-layer stackthat includes the insulating outer layer 132A and the base layer 132B.In FIG. 1B, the base layer 132B and the insulating outer layer 132A areelectrically insulating with regard to the first liquid 106 and thesecond liquid 108 and the driving electrode 126. In addition, theinsulating outer layer 132A may be hydrophobic.

The base layer 132B and/or the insulating outer layer 132A can includeone or more of polytetrafluoroethylene (PTFE), parylene, porousorganosilicate films comprising silsesquioxane, polyimide, fluorinatedpolyimide, SiLK® semiconductor dielectric resin (from Dow ChemicalCompany), fluorine-doped silicon oxides, fluorinated amorphous carbonthin films, silicone polymers, amorphous fluoropolymers (e.g., Teflon®from DuPont), poly (arylene ethers), fluorinated and non-fluorinatedpara-xylylene linear polymers (e.g., Parylene C), amorphousfluoropolymers (e.g., Cytop® from Asahi Glass Co.), Hyflon® (fromSolvay), aromatic vinyl siloxane polymers (e.g., DVS-BCD from DowChemical), diamond-like carbon, polyethylene, polypropylene,fluoroethylene propylene polymer, polynaphthalene, silicone-likepolymeric films (SiO_(x)C_(y)H_(z)), SiO₂, Si₃N₄, BaTiO₃, HfO₂, HfSiO₄,ZrO₂, Ta₂O₅, TiO₂, BarSrTiO₃, SrTiO₃, Al₂O₃, La₂O₃, Y₂O₃, insulatingsol-gels (e.g., silicon alkoxides), and spin-on-glass (e.g., Accuglass®Honeywell, Inc.). In a preferred implementation, the base layer 132Bincludes a parylene material (e.g., Parylene C). According to variousexamples, the base layer 132B is hydrophobic.

A thickness of the insulating outer layer 132A of the insulating element132 may be from about 0.01 μm to about 2 μm, or from about 0.01 μm toabout 1.5 μm, or from about 0.01 μm to about 1 μm, or from about 0.05 μmto about 2 μm, or from about 0.05 μm to about 1 μm, or from about 0.05μm to about 0.5 μm, or from about 0.05 μm to about 0.4 μm, or from about0.1 μm to about 2 μm, or from about 0.1 μm to about 1.5 μm, or fromabout 0.1 μm to about 1 μm, or from about 0.1 μm to about 0.5 μm, or anyand all values and ranges therebetween.

Referring now to FIGS. 2-5F, depicted is a flowchart and variousembodiments of a method 150 of forming the liquid lens 100 and thecomponents of the liquid lens 100, as well as pictures of the method 150through the various steps.

The method 150 may begin with a step 154 of positioning a firstsubstrate 174 (e.g., the first outer layer 118 or a plurality of firstouter layers 118 for a plurality of liquid lenses 100 formed from thefirst substrate 174) defining a hole 190 over a second substrate 178(e.g., the intermediate layer 120, the second outer layer 122, and/or acombination of the intermediate layer 120 and the second outer layer122, or a plurality thereof for a plurality of liquid lenses 100 formedfrom the second substrate 178), wherein the cavity 104 is defined abovea window (e.g., the second window 116 defined by a portion of the secondsubstrate 178 as described herein) and aligned with the hole 190 of thefirst substrate 174. According to such examples, the first substrate174, or a portion thereof, defines the first window 114, and the secondsubstrate 178, or a portion thereof, defines the second window 116.According to other examples, the first substrate 174 may be a mask ormask layer, and the second substrate 178 includes the second outer layer122, a portion thereof defining the second window 116. The mask may becomposed of a glass, a glass-ceramic, a ceramic, a polymeric material, ametal, a composite material, and/or combinations thereof. According tovarious examples, the mask may be thinner, less dense, and/or weigh lessthan the first outer layer 118. Upon completion of one or more of thesteps of the method 150, the mask or mask layer may be removed andreplaced with the first outer layer 118.

As explained above, the first substrate 174 (e.g., the mask or the firstouter layer 118) defines or comprises the hole 190. It will beunderstood that the first substrate 174 may define or comprise aplurality of holes 190 in a pattern or array. The hole 190 is definedthrough the first substrate 174 such that fluid and/or electricalcommunication across the first substrate 174 may be accomplished. As thefirst substrate 174 is positioned over the second substrate 178, thehole 190 may be aligned with the cavity 104. For purposes of thisdisclosure, aligned may mean that the hole 190 and the cavity 104partially or entirely overlap, are in fluid communication or otherwiseallow the first liquid 106 and/or the second liquid 108 to pass throughthe first substrate 174 and into the cavity 104.

In another embodiment, a gap 182 (FIG. 4A) may be defined between thefirst substrate 174 and the second substrate 178. The gap 182 may bedefined by one or more spacers or inserts between the first substrate174 and the second substrate 178, or may exist due to the shape,morphology or roughness of the first substrate 174 and/or the secondsubstrate 178. The gap 182 may have a constant or a changing width asmeasured between inboard surfaces of the first substrate 174 and thesecond substrate 178. The width of any point of the gap 182 may rangefrom about 10 μm to about 500 μm, or from about 10 μm to about 475 μm,or from about 10 μm to about 450 μm, or from about 10 μm to about 425μm, or from about 10 μm to about 400 μm, or from about 10 μm to about375 μm, or from about 10 μm to about 350 μm, or from about 10 μm toabout 325 μm, or from about 10 μm to about 300 μm, or from about 10 μmto about 275 μm, or from about 10 μm to about 250 μm, or from about 10μm to about 225 μm, or from about 10 μm to about 200 μm, or from about10 μm to about 175 μm, or from about 10 μm to about 150 μm, or fromabout 10 μm to about 125 μm, or from about 10 μm to about 100 μm, orfrom about 100 μm to about 250 μm, or from about 25 μm to about 200 μm.For example, the width of any point of the gap 182 may be about 10 μm,or about 20 μm, or about 30 μm, or about 40 μm, or about 50 μm, or about60 μm, or about 70 μm, or about 80 μm, or about 90 μm, or about 100 μm,or about 110 μm, or about 120 μm, or about 130 μm, or about 140 μm, orabout 150 μm, or about 160 μm, or about 170 μm, or about 180 μm, orabout 190 μm, or about 200 μm, or about 210 μm, or about 220 μm, orabout 230 μm, or about 240 μm, or about 250 μm, or about 260 μm, orabout 270 μm, or about 280 μm, or about 290 μm, or about 300 μm, or anyand all ranges and values therebetween.

According to various embodiments, the gap 182 (FIG. 4A) may bepartially, substantially, or completely filled with a polar fluid 186(FIG. 4A). For example, the method 150 can include introducing the polarfluid 186 into the gap 182 to partially, substantially, or completelyfill the gap 182. The polar fluid 186 may have the same composition,substantially the same composition, or include one or more of the sameconstituents as the first liquid 106. In yet other embodiments, thepolar fluid 186 may have a different composition than the first liquid106. According to various embodiments, the polar fluid 186 positionedwithin the gap 182 may be in fluid communication with the first liquid106 once the first liquid 106 is positioned in the cavity 104 over thesecond liquid 108 as described in greater detail below. Further, as thepolar fluid 186 is positioned between the first substrate 174 and thesecond substrate 178, the polar fluid 186 may substantially surround thecavity 104 at the gap 182. For example, upon introducing the polar fluid186 into the gap 182, the polar fluid 186 may flow between the firstsubstrate 174 and the second substrate 178 (e.g., by capillary action)until the polar fluid 186 substantially surrounds an opening or mouth ofthe cavity 104. As the polar fluid 186 will essentially ring thecircumference of the cavity 104, the polar fluid 186 may aid inretaining the second liquid 108 within the cavity 104. For example, thepolar fluid 186 may form a barrier that substantially prevents the firstliquid 106 from spontaneously exiting the cavity 104 (e.g., as a resultof a repulsive force between the first liquid 106 and the insulatingelement 132) upon introducing the first liquid 106 into the cavity 104as described herein.

Next, a step 158 of dispensing the second liquid 108 into the cavity 104defined above or within the second substrate 178 is performed. Thesecond liquid 108 may be poured, dispensed, or otherwise provided to thecavity 104 through the hole 190 in the first substrate 174. As thesecond liquid 108 may be a non-polar liquid, and the base layer 132Band/or the insulating outer layer 132A of the insulating element 132 maybe composed of a hydrophobic material, the second liquid 108 maypreferentially seat itself or remain in the lower portion of the cavity104. Such a feature may be advantageous later in the method 150 inmaintaining the second liquid 108 in place within the cavity 104 duringsubsequent steps of the method 150. For example, as polar embodiments ofthe first liquid 106 are positioned in the cavity 104, the tendency ofthe second liquid 108 to remain against the base layer 132B and/or theinsulating outer layer 132A may retain the second liquid 108 ingenerally the orientation shown in FIGS. 1A and 1B.

Next, a step 162 of positioning a dispenser 194 having a dispensing end194A over the second liquid 108 is performed. The dispenser 194 may be atube, microfluidic device, nozzle, pipette, solenoid valve, syringe,other dispensing device, or combinations thereof. As will be explainedin greater detail below, the dispenser 194 is configured to dispense thefirst liquid 106 in a single drop or possibly in a plurality of dropsfrom the dispensing end 194A. It will be understood that a plurality ofdispensers 194, each having a dispensing end 194A, may be positionedover the second liquid 108 in a plurality of cavities 104 and that oneor more of the dispensing ends 194A may dispense the first liquid 106 aseither a single drop or possibly in a plurality of drops. The picture ofFIG. 5A shows the dispensing end 194A centered over the second liquid108 within the cavity 104.

A center or central axis of the dispensing end 194A of the dispenser 194may be aligned with a central axis (e.g., a direction perpendicular toan apex or vertex) of the second liquid 108 in the cavity 104, or thecenter of the dispensing end 194A may be slightly offset. The center ofthe dispensing end 194A may be offset from the central axis of thesecond liquid 108 from about 0 μm to about 100 μm, or from about 0 μm toabout 90 μm, or from about 0 μm to about 80 μm, or from about 0 μm toabout 70 μm, or from about 0 μm to about 60 μm, or from about 0 μm toabout 50 μm, or from about 0 μm to about 40 μm, or from about 0 μm toabout 30 μm, or from about 0 μm to about 20 μm, or from about 0 μm toabout 10 μm, or any and all values and ranges therebetween. In apreferred embodiment, the central axis of the dispensing end 194A isaligned with the central axis of the second liquid 108 in the cavity 104(at least approximately corresponding to the optical axis 112 of theliquid lens 100 being formed).

Next, a step 166 of capping the second liquid 108 with the first liquid106 dispensed through the hole 190 is performed. As depicted in FIG. 5B,a drop 177 of a predetermined volume of the first liquid 106 begins toform at the dispensing end 194A. The picture of FIG. 5C shows the drop177 of the predetermined volume of the first liquid 106 fully formed.The drop 177 forms a nearly perfect sphere, the circumference of thespherical drop 177 in the picture is less than the circumference of thehole 190. In other circumstances, the circumference of the drop 177 canapproximate the circumference of the hole 190. The picture of FIG. 5Dshows the first liquid 106 just as the drop 177 dissociates from thedispensing end 194A and deforms. Attractive forces between the firstliquid 106 and the polar fluid 186 pull the first liquid 106 from thedrop 177 and the polar fluid 186 together to form a contiguous cap overthe second liquid 108. Repulsive forces between the second liquid 108and both the first liquid 106 from the drop 177 and the polar fluid 186maintain the second liquid 108 within the cavity 104 while the capdevelops over the second liquid 108. In other instances, attractiveforces between the surface of the hole 190 and the first liquid 106 inthe drop 177 dissociate the drop 177 from the dispensing end 194A, andthe first liquid 106 slides down the surface of the hole 190 until thefirst liquid 106 and the polar fluid 186 meet to form a contiguous capover the second liquid 108. The picture of FIG. 5E shows the firstliquid 106 capping the second liquid 108 but with an air bubble 109within the cavity 104 forcing the first liquid 106 upward within thehole 190. The picture of FIG. 5F shows the first liquid 106 capping thesecond liquid 108 after the air bubble 109 escapes from the cavity 104and the first liquid 106 is able to drop below the hole 190. Capping thesecond liquid 108 in this manner, before or essentially simultaneouslywith the first liquid 106 contacting the second liquid 108, prevents thedispensing of the first liquid 106 into the cavity 104 from displacingthe second liquid 108 outside of the cavity 104. The interaction betweenthe first liquid 106 from the drop 177 and the surface of the hole 190and/or the polar fluid 186 prevents the drop 177 from free-fallingthrough the hole 190 and splashing onto the second liquid 108, whichwould cause the second liquid 108 to exit the cavity 104.

The volume of the first liquid 106 is predetermined as a function of thetotal volume of the first liquid 106 and the second liquid 108 that isnecessary to fill the cavity 104 of the liquid lens 100, and the desiredvolume ratio of the first liquid 106 to the second liquid 108.Preferably the predetermined volume of the first liquid 106 is deliveredin one drop 177. Obtaining one drop 177 of the predetermined volume ofthe first liquid 106 that forms a spherical shape outside of thedispensing end 194A is a function of the surface tension of the firstliquid 106, as well as the surface composition and the inner diameter(e.g., an opening through which the first liquid 106 passes) of thedispensing end 194A.

In some embodiments, the volume of the first liquid 106 dispensed intothe cavity 104 to cap the second liquid 108 may be from about 500nanoliters to about 3.0 microliters, or from about 600 nanoliters toabout 1.5 microliters, or from about 700 nanoliters to about 1.1microliters, or from about 800 nanoliters to about 1.0 microliter. Forexample, the quantity of the first liquid 106 provided to cap the secondliquid 108 may be about 800 nanoliters, about 850 nanoliters, about 900nanoliters, about 1.0 microliter, 1.1 microliters, or about 1.2microliters, or about 1.3 microliters, or about 1.4 microliters, orabout 1.5 microliters, or about 1.6 microliters, or about 1.7microliters, or about 1.8 microliters, or about 1.9 microliters, orabout 2.0 microliters, or about 2.1 microliters, or about 2.2microliters, or about 2.3 microliters, or about 2.4 microliters, orabout 2.5 microliters, or about 2.6 microliters, or about 2.7microliters, or about 2.8 microliters, or about 2.9 microliters, orabout 3.0 microliters, or any and all values and ranges therebetween.

The volume of the first liquid 106 dispensed may be such that avolumetric ratio of the second liquid 108 to the first liquid 106 in thecavity 104 may be from about 0.01 to about 0.99, or about 0.1 to about0.9, or about 0.2 to about 0.8, or about 0.3 to about 0.7, or about 0.4to about 0.6. For example, the volumetric ratio of the second liquid 108to the first liquid 106 in the cavity 104 may be about 0.01, or about0.05, or about 0.1, or about 0.15, or about 0.2, or about 0.25, or about0.3, or about 0.35, or about 0.4, or about 0.45, or about 0.5, or about0.55, or about 0.6, or about 0.65, or about 0.7, or about 0.75, or about0.8, or about 0.85, or about 0.9, or about 0.95, or about 0.99, or anyand all values and ranges therebetween. It will be understood that thefirst liquid 106 and/or the second liquid 108 may have a volumetricratio to the total volume of the mixed first liquid 106 and the secondliquid 108 of from about 0.01 to about 0.99, or about 0.1 to about 0.9,or about 0.2 to about 0.8, or about 0.3 to about 0.7, or about 0.4 toabout 0.6, or any and all values and ranges therebetween.

In some embodiments, however, the dispensing end 194A of the dispenser194 may have an internal diameter of from about 100 μm to about 300 μm,or from about 125 μm to about 275 μm, or from about 150 μm to about 250μm, or from about 175 μm to about 225 μm. For example, the internaldiameter of the dispensing end 194A of the dispenser 194 may be about100 μm, or about 110 μm, or about 120 μm, or about 130 μm, or about 140μm, or about 150 μm, or about 160 μm, or about 170 μm, or about 180 μm,or about 190 μm, or about 200 μm, or about 210 μm, or about 220 μm, orabout 230 μm, or about 240 μm, or about 250 μm, or about 260 μm, orabout 270 μm, or about 280 μm, or about 290 μm, or about 300 μm, or anyand all values and ranges therebetween. In the event that the volume ofthe largest drop 177 that is able to form with the particularcombination of the first liquid 106 and the dispensing end 194A is lessthan the predetermined volume, then step 166 includes dispensing morethan one drop 177 into the cavity 104. In some embodiments, the firstdrop 177 is able to cap the second liquid 108. Subsequent drops 177 addadditional volume of the first liquid 106 until the predetermined volumeof the first liquid 106 within the cavity 104 has been achieved.

The dispensing end 194A of the dispenser 194 is preferably positionedsuch that the circumference of the drop 177 at its largest sphericalextent is proximate the polar fluid 186 or the hole 190 above the polarfluid 186. Accordingly, before the drop 177 is formed, the dispensingend 194A can be positioned a predetermined distance 187 away from aplane defined by a top surface 175 of the first substrate 174 or apredetermined distance 189 away from the second liquid 108 within thecavity 104. In some embodiments, the distance 187 between the planedefined by the top surface 175 of the first substrate 174 is from about0.1 mm to about 10 mm, or from about 0.2 mm to about 9 mm, or from about0.3 mm to about 8 mm, or from about 0.4 mm to about 7 mm, or from about0.5 mm to about 6 mm, or from about 0.5 mm to about 5 mm, or from about0.5 mm to about 4 mm, or from about 0.5 mm to about 3 mm, or from about1 mm to about 3 mm, or from about 0.5 mm to about 2 mm, or from about0.5 mm to about 1 mm. For example, the distance 187 can be about 0.1 mm,or about 0.5 mm, or about 1 mm, or about 1.5 mm, or about 2 mm, or about2.5 mm, or about 3 mm, or about 3.5 mm, or about 4 mm, or about 4.5 mm,or about 5 mm, or about 5.5 mm, or about 6 mm, or about 6.5 mm, or about7 mm, or about 7.5 mm, or about 8 mm, or about 8.5 mm, or about 9 mm, orabout 9.5 mm, or about 10 mm, or any and all values and rangestherebetween.

As explained above, the first liquid 106 used to cap the second liquid108 is preferably in a single drop 177 (i.e., as shown in FIG. 3A andFIGS. 5A-5F) or in a plurality of drops 177. In single drop 177embodiments, an entirety of the first liquid 106 dispensed from thedispensing end 194A is dispensed as a single drop 177. In embodimentswhere a plurality of dispensers 194 are utilized, one or more of thedispensers 194 dispense a single drop 177 or one or more of thedispensers 194 dispense a plurality of drops 177. Regardless of thenumber of drops 177 dispensed, the capping of the second liquid 108 bythe first liquid 106 is done such that the first liquid 106 and thesecond liquid 108 are substantially free of mixing. Minimizing thedistance between the drop 177 and the hole 190 or the second liquid 108reduces the impact between the first liquid 106 and the second liquid108 such that the release of the drop 177 from the dispensing end 194Adoes not cause the first liquid 106 and the second liquid 108 tosubstantially mix. For example, as mentioned, the first liquid 106(e.g., the drop 177 of the first liquid 106) may initially contact thesurface of the hole 190 and then slowly fall into the cavity 104 whilein contact with surface of the hole 190, thereby limiting the velocityat which the first liquid 106 contacts the second liquid 108 disposed inthe cavity 104.

According to various examples, step 166 may be performed within a shortperiod of time after step 158. Depending on the composition of thesecond liquid 108, the second liquid 108 may tend to evaporate orotherwise dissipate while not capped with the first liquid 106. Step 166of capping the second liquid 108 with the first liquid 106 may beperformed within about 10 minutes, or about 9 minutes, or about 8minutes, or about 7 minutes, or about 6 minutes, or about 5 minutes, orabout 4 minutes, or about 3 minutes, or about 2 minutes, or about 1minute, or about 45 seconds, or about 30 seconds, or about 15 seconds,or about 10 seconds, or about 9 seconds, or about 8 seconds, or about 7seconds, or about 6 seconds, or about 5 seconds, or about 4 seconds, orabout 3 seconds, or about 2 seconds, or about 1 second of the completionof step 158. Such capping may help to prevent evaporation of the secondliquid 108 as the first liquid 106 fills the cavity 104.

According to various embodiments, the method 150 does not include step162, and step 166 of capping the second liquid 108 is carried out bypositioning the first liquid 106 on the first substrate 174 such thatthe first liquid 106 flows into the cavity 104 through the hole 190. Thefirst liquid 106 may be positioned on the first substrate 174 in avariety of manners. For example, the first liquid 106 may be dispensed(e.g., poured) onto the first substrate 174 such that as the firstliquid 106 accumulates, it flows across the first substrate 174 andthrough the holes 190 into the cavity 104. It will be understood that insuch an example, the first liquid 106 may be dispensed in a singlelocation on the first substrate 174 or in a plurality of locations.

Next, a step 170 of translating at least one of the first substrate 174and/or the second substrate 178 such that the hole 190 is not alignedwith the cavity 104 is performed (as shown in FIG. 3B). For example, thefirst substrate 174 may be translated (e.g., with the second substrate178 held stationary), the second substrate 178 may be translated (e.g.,with the first substrate 174 held stationary), or both the firstsubstrate 174 and the second substrate 178 may be translated such thatthe hole 190 is no longer aligned with the cavity 104. As the hole 190is no longer aligned with the cavity 104, the first liquid 106 and thesecond liquid 108 are held in place within the cavity 104. It will beunderstood that in examples of the method 150 where the first substrate174 is a mask or mask layer as described above, the first substrate 174may be translated relative to the second substrate 178 by removing themask and replacing it with the first outer layer 118.

Concurrently or subsequently with step 170, a step of collapsing the gap182 (e.g., as shown in FIG. 4B) such that the polar fluid 186 in the gap182 is substantially evacuated can be performed. The gap 182 may becollapsed by applying pressure to the first substrate 174 and the secondsubstrate 178 in an inward direction such that the width of the gap 182is decreased and the polar fluid 186 of the gap 182 is forced out.Additionally or alternatively, the polar fluid 186 may be drawn out fromthe gap 182 (e.g., by drying, wicking, sucking, etc.) such that thewidth of the gap 182 decreases until the gap 182 is supported by surfaceroughness of the first substrate 174 and the second substrate 178.

After completion of the method 150, a number of additional steps oractions may be taken. For example, the first substrate 174 and thesecond substrate 178 may be coupled (e.g., through a laser and/oradhesive bonding process), and in examples where a plurality of cavities104 exist on a single wafer (e.g., a combination of the first substrate174 and the second substrate 178), the wafer may be diced or singulatedto form a plurality of liquid lenses 100.

It will be understood that although the method 150 was described asincluding a number of steps in a particular order, it will be understoodthat the method 150 may add or omit one or more steps, that steps may beperformed out of the described order, or that one or more steps may beperformed substantially simultaneously without departing from theteachings provided herein.

Referring now to FIG. 4A, provided is a schematic depiction of thestructures used in the method 150. As explained above, the firstsubstrate 174 (which may correspond to the first outer layer 118 ofFIGS. 1A and 1B) is positioned over the second substrate 178 (e.g.,corresponding to the intermediate layer 120, the second outer layer 122,and/or a combination of the intermediate layer 120 and the second outerlayer 122 of FIGS. 1A and 1B). The gap 182 is filled with the polarfluid 186. The first substrate 174 defines one or more holes 190. Asshown, the holes 190 are aligned with the cavities 104 defined above thesecond substrate 178. Further, the first substrate 174 may be thinned orhave a reduction in thickness proximate the first windows 114. Such afeature may be advantageous in allowing the first substrate 174 to flexunder force from the expansion or contraction of the first liquid 106and the second liquid 108. As explained above, the first liquid 106 isprovided to the cavity 104 by the dispenser 194 having the dispensingend 194A. The first liquid 106 is dispensed as one or a plurality ofdrops 177 through the holes 190 of the first substrate 174 and into thecavity 104.

Referring now to FIG. 4B, the gap 182 between the first substrate 174and the second substrate 178 has been collapsed such that the polarfluid 186 has been removed. Further, the first substrate 174 and thesecond substrate 178 have been translated relative to one another suchthat the holes 190 are no longer aligned with the cavities 104, but thefirst windows 114 and the second windows 116 are aligned. Translation ofthe first substrate 174 and/or the second substrate 178 may allow thefirst substrate 174 and the second substrate 178 to retain the firstliquid 106 and the second liquid 108 within the cavity 104.

Use of the presently disclosed method 150 and the liquid lens 100 mayhave a variety of advantages.

First, use of the single and multiple drop 177 embodiments of step 166provide a soft, low energy, method to cap the second liquid 108 with thefirst liquid 106. Using low energy methods of capping may beadvantageous in preventing disturbance of the previously dispensedsecond liquid 108, preventing splashing of the first liquid 106 and/orthe second liquid 108 from the cavity 104, and preventing mixing of thefirst liquid 106 and the second liquid 108.

Second, use of the dispenser 194 and the control of the location of thedispensing end 194A may be advantageous in controlling the capping drop177 shape, volume, and release as well as other conditions which mayaffect the relative placement of the first liquid 106 and the secondliquid 108.

Third, as capping of the second liquid 108 with the first liquid 106 isperformed within a short period of time after the positioning of thesecond liquid 108 within the cavity 104, production costs may bereduced. As mentioned, prolonged exposure of the second liquid 108 tothe environment may result in evaporation of one or more constituents ofthe second liquid 108. Accordingly, by decreasing the amount of time thesecond liquid 108 is left uncapped, less constituents may evaporate andless of the second liquid 108 may be lost.

Fourth, use of the dispenser 194 may prevent the unintentional fillingof the cavities 104. For example, conventional techniques mayinadvertently fill multiple cavities 104 with the first liquid 106 whichmay disturb the second liquid 108 or provide a non-uniform amount of thefirst liquid 106. By utilizing the dispenser 194, the individualcavities 104 may be filled with a consistent amount of the first liquid106 on demand.

Fifth, use of the dispenser 194 and the method 150 may allow for a highvolume process of capping the second liquid 108 by lower capitalequipment cost while producing higher process throughput and yield overconventional liquid lens 100 manufacturing processes.

EXAMPLES

Example 1—A second substrate 178 was prepared with twelve (12) cavities104 patterned therein. Each cavity 104 was conical with a 2.5 mmdiameter at the narrow end 105A. The cavities 104 were separated,center-to-center (i.e., optical axis 112 to optical axis 112), by adistance of 8 mm. The second substrate 178 had a thickness of 0.591 mm.A 1.4 μm thick insulating outer layer 132A of parylene C was applied toeach cavity 104, making that portion of the cavity 104 hydrophobic.

A first substrate 174 of a mask having a thickness of 0.637 mm andtwelve (12) holes 190, each having a diameter of 1.6 mm, was prepared.The mask first substrate 174 was placed on the second substrate 178 withthe center of each hole 190 being aligned with the center (i.e., theoptical axis 112) of the cavity 104 below the hole 190. A gap 182 wasdefined between the mask first substrate 174 and the second substrate178 using a spacer having a thickness of 50 μm. A polar fluid 186 havinga composition of 50 wt % ethylene glycol mix with 46.75 wt % water, 3 wt% sodium Bromide, and 0.25 wt % pentanol was dispensed within the gap182. The polar fluid 186 did not enter the cavities 104, because theinsulating outer layer 132A of parylene C applied to each cavity 104repelled the polar fluid 186.

A Lee solenoid valve INKX0517500A VHS-M/M-FCR-24V with a 0.008″ (˜203μm) bore needle was utilized to dispense a volume of 850 nanoliters of asecond liquid 108 into each cavity 104. The second liquid 108 was amixture of phenyltrimethylgermane, phenyltris(trimethoxysiloxy)silane,and butylated hydroxyltoluene. A Nordson EFD syringe barrel with adapterwas charged with 50 milliliters of a first liquid 106, which was thesame as the polar fluid 186. The Nordson EFD syringe barrel was in fluidcommunication with a Corsolution pressure and flow sensor pump tofunction as a dispenser 194 and dispense a controlled volume of thefirst liquid 106 through the 0.008″ (˜203 μm) bore needle at thedispensing end 194A. The dispensing end 194A of the dispenser 194 wasrobotically centered above the center of each hole 190 of the mask firstsubstrate 174, and approximately 1 mm above the plane defined by the topsurface 175 of the first substrate 174. The dispenser 194 thendispensed, through the dispensing end 194A, a single large drop 177 of5-8 microliters of the first liquid 106 onto the second liquid 108within each of the cavities 104. The drop 177 was approximately 100-200μm above the top surface 175 upon disassociation from the dispensing end194A. The dispensed volume of the first liquid 106 capped the secondliquid 108 without displacing the second liquid 108 out of the cavity104. The dispensing of the first liquid 106 into all twelve (12)cavities 104 of the second substrate 178 took a time period ofapproximately 20 seconds.

Example 2—A second substrate 178 was prepared with twelve (12) cavities104 patterned therein. Each cavity 104 was conical with a 2.5 mmdiameter at the narrow end 105A. The cavities 104 were separated,center-to-center (i.e., optical axis 112 to optical axis 112), by adistance of 8 mm. The second substrate 178 had a thickness of 0.591 mm.A 1.4 μm thick insulating outer layer 132A of parylene C was applied toeach cavity 104, making that portion of the cavity 104 hydrophobic.

A first substrate 174 of a mask having a thickness of 0.647 mm andtwelve (12) holes 190 each having a diameter of 1.6 mm, was prepared.The mask first substrate 174 was placed on the second substrate 178 withthe center of each hole 190 aligned with the center (i.e., the opticalaxis 112) of the cavity 104 below the hole 190. A gap 182 was definedbetween the mask first substrate 174 and the second substrate 178 usinga spacer having a thickness of 50 μm. A polar fluid 186 having acomposition of 50 wt % ethylene glycol mix with 46.75 wt % water, 3 wt %sodium Bromide, and 0.25 wt % pentanol was dispensed within the gap 182.The polar fluid 186 did not enter the cavities 104, because theinsulating outer layer 132A of parylene C applied to each cavity 104repelled the polar fluid 186.

A 2 microliter pipette was utilized to dispense a volume of 850nanoliters of a second liquid 108 into each cavity 104. The secondliquid 108 was a mixture of phenyltrimethylgermane,phenyltris(trimethoxysiloxy)silane, and butylated hydroxyltoluene. Asyringe pump was charged with 50 milliliters of a first liquid 106,which was the same as the polar fluid 186. The syringe pump functionedas a dispenser 194 to dispense a controlled volume of the first liquid106 with a 0.008″ (˜203 μm) bore needle as the dispensing end 194A. Thedispensing end 194A of the dispenser 194 was robotically centered abovethe center of each hole 190 of the mask first substrate 174, andapproximately 1 mm above the plane defined by the top surface 175 of thefirst substrate 174. The dispenser 194 then dispensed, through thedispensing end 194A, a single large drop 177 of 5-8 microliters of thefirst liquid 106 onto the second liquid 108 within each of the cavities104. The drop 177 was approximately 100-200 μm above the top surface 175upon disassociation from the dispensing end 194A. The dispensed volumeof the first liquid 106 capped the second liquid 108 and did notdisplace the second liquid 108 out of the cavity 104. The dispensing ofthe first liquid 106 into all twelve (12) cavities 104 of the secondsubstrate 178 took a time period of approximately 30 seconds.

While exemplary embodiments and examples have been set forth for thepurpose of illustration, the foregoing description is not intended inany way to limit the scope of disclosure and appended claims.Accordingly, variations and modifications may be made to theabove-described embodiments and examples without departing substantiallyfrom the spirit and various principles of the disclosure. All suchmodifications and variations are intended to be included herein withinthe scope of this disclosure and protected by the following claims.

1. A method of forming a liquid lens, comprising the steps of:positioning a first substrate defining a hole over a second substrate,wherein a cavity is defined within the second substrate and aligned withthe hole; dispensing a second liquid into the cavity defined within thesecond substrate; capping the second liquid with a first liquiddispensed through the hole, wherein the first liquid and the secondliquid have different refractive indices than each other; andtranslating at least one of the first substrate or the second substratesuch that the hole is not aligned with the cavity.
 2. The method ofclaim 1, wherein the first substrate is a mask layer.
 3. The method ofclaim 1, wherein the first substrate defines a first window and thesecond substrate defines a second window. 4-5. (canceled)
 6. The methodof claim 1, wherein the first liquid comprises a polar liquid and thesecond liquid comprises a non-polar liquid.
 7. (canceled)
 8. The methodof claim 1, wherein: the first substrate comprises a first outer layer;and the second substrate comprises an intermediate layer and a secondouter layer bonded to the intermediate layer, a bore through theintermediate layer defining the cavity.
 9. The method of claim 1,wherein, the cavity includes an insulating element that is hydrophobic,and after the second liquid is dispensed within the cavity, the secondliquid contacts the insulating element.
 10. The method of claim 1,wherein, capping the second liquid with a first liquid dispensed throughthe hole comprises dispensing the entirety of the first liquid that capsthe second liquid in a single drop from a dispensing end of a dispenser.11-12. (canceled)
 13. The method of claim 1, wherein, the first liquiddispensed contacts a surface of the first substrate defining the holebefore contacting the second liquid.
 14. A method of forming a liquidlens, comprising the steps of: positioning a first substrate defining ahole over a second substrate, wherein a cavity is defined above thesecond substrate and aligned with the hole; dispensing a second liquidinto the cavity defined above the second substrate; positioning adispenser having a dispensing end over the second liquid; capping thesecond liquid with a first liquid dispensed through the hole, whereinthe first liquid that caps the second liquid is dispensed in one dropfrom the dispensing end, and the first liquid and the second liquid havedifferent refractive indices than each other; and translating at leastone of the first substrate or the second substrate such that the hole isnot aligned with the cavity.
 15. (canceled)
 16. The method of claim 14,wherein the dispensing end of the dispenser has an internal diameter offrom about 150 μm to about 250 μm.
 17. The method of claim 14, whereinthe drop forms a sphere having a circumference that is less than acircumference of the hole.
 18. The method of claim 14, wherein a centralaxis of the dispensing end aligns with a central axis of the secondliquid.
 19. The method of claim 14, wherein the drop dissociates fromthe dispensing end and contacts a surface of the first substrate thatdefines the hole before contacting the second liquid. 20-22. (canceled)23. The method of claim 14, wherein: the second substrate comprises aplurality of cavities each holding the second liquid; the firstsubstrate comprises a plurality of holes, each disposed over one of theplurality of cavities; a plurality of dispensers each comprising adispensing end are positioned over the second liquid in each of theplurality of cavities; and the first liquid is simultaneously dispensedfrom each of the plurality of dispensers.
 24. The method of claim 14,wherein after the drop of the first liquid caps the second liquid, asubsequent drop of the first liquid is dispensed to add additionalvolume of the first liquid until a predetermined volume of the firstliquid within the cavity has been achieved.
 25. (canceled)
 26. A methodof forming a liquid lens, comprising the steps of: positioning a firstsubstrate defining a hole over a second substrate, wherein a cavity isdefined within the second substrate and aligned with the hole, a gapextends between the first substrate and the second substrate, and apolar fluid is disposed in the gap between the first substrate and thesecond substrate; dispensing a second liquid into the cavity definedabove the second substrate; capping the second liquid with a firstliquid dispensed through the hole, wherein the first liquid and thesecond liquid have different refractive indices than each other; andtranslating at least one of the first substrate or the second substratesuch that the hole is not aligned with the cavity.
 27. The method ofclaim 26, wherein the polar fluid and the first liquid havesubstantially the same composition.
 28. The method of claim 26, whereinthe first liquid that caps the second liquid is dispensed in one drop.29. The method of claim 26, wherein the first liquid that is dispensedmeets the polar fluid and forms a contiguous cap with the polar fluidover the second liquid.
 30. The method of claim 26, further comprisingthe step: collapsing the gap such that the polar fluid in the gap issubstantially evacuated.